Features of ion-plasmic precipitation of solid solution films (SIC)1-X(AlN)X
Annotation
Results of researches aimed at development of technology to make films of solid solutions (SiC)1-x(AlN)x are presented. Features of precipitation technology of films (SiC)1-x(AlN)x, factors influencing the structure and quality of films precipitated are considered. The structure, composition and surface morphology of received experimental samples (SiC)1-x(AlN)x were studied by X-ray diffraction and electron microscopy. Films obtained on 6H-SiC substrates at temperature T~1273 K were shown to have monocrysalline structure.
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