Journal
Scientific and technical journal «Priborostroenie»
UDK681.7.08
Issue:12 (59)
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HIGH-PRECISION METHOD FOR CONTROL OF CURVATURE RADII OF OPTICAL SURFACES
Annotation
The actual problem of modern metrological maintenance in optical technologies related to highprecision control of the radius of curvature and shape parameters of optical mirrors is discussed. A comparative analysis of technical characteristics of modern interference systems and optical-electronic devices based on wavefront sensors such as Shack — Hartmann (SHWFS) is presented. An original circuit solution for development of a modernized functional diagram of the interference control equipment based on wavefront sensor (OEDWFS) for measuring optical surface curvature radius is described. A new highprecision method for control of curvature radius of surface mirrors with a permissible error of the measurement less than 0,01 % of the nominal value is proposed and scientifically justified. An analysis is given of the output parameter of the functional circuit of the DWF-based instrument — the limiting radius of the recorded wavefront.
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