Journal
Scientific and technical journal «Priborostroenie»
UDK004.942
Issue:4 (60)
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DETERMINING COORDINATES OF LOCAL MAXIMA OF LIGHT SIGNAL INTENSITY IN DIFFRACTION PATTERN OF THE SURFACE WITH PERIODIC STRUCTURE
Annotation
An automatic searching method for local maxima of light intensity distribution along diffraction pattern image is presented. The proposed approach consists in slicing the initial intensity oscillation diagram by approximation function for average values so that the required diffraction peaks will lie above the approximating curve, and therefore the local extrema can be found with any algorithm searching for maximum in an uninterrupted segment. Calculated coordinates of local maxima can be used for determining geometrical parameters of periodical structures with the double Fourier transform method. The method is recommended for the use in automatic quality control.
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