Journal
Scientific and technical journal «Priborostroenie»
UDK681.7.064.454
Issue:11 (60)
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ANALYSIS OF THE INFLUENCE OF ERRORS IN LAYERS MANUFACTURING OF OPTICAL COATING ON ITS SPECTRAL CHARACTERISTICS
Annotation
A method is presented for analysis of manufacturing errors of the layers forming the optical coating structure to determine the layer that contribute most to the spectral characteristics of the coating. Sensitivity of the interference coatings to deviation of the layer geometric thicknesses from calculated value is estimated for each of the layers. In the process of identifying the layer which contributes most to the coating spectral characteristics stability, all the layers thicknesses are alternately replaced with a set of values differing from the calculated by a known amount. For the newly obtained structure, a merit function is evaluated. The layer, which corresponds to the maximum value of the merit function, is considered to be the most sensitive to geometric inaccuracies of manufacture.
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