Journal
Scientific and technical journal «Priborostroenie»
UDK681.586
Issue:7 (62)
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NEW TECHNOLOGICAL TECHNIQUE ENSURING RELIABILITY AND STABILITY OF OUTPUT PARAMETERS OF MICROMECHANICAL PRESSURE SENSORS
Annotation
A new technological method ensuring characteristics of reliability and stability of the output parameters of micromechanical pressure sensors is presented. The reliability parameters of sensitive elements of pressure sensors are calculated. Results of autonomous accelerated tests and tests for reliability are demonstrated.
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