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COMBINED OPTICAL METHOD FOR MEASURING THE THICKNESS OF LAYERS OF TRANSPARENT COATINGS AND FILMS

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The problem of measuring the thickness of transparent low-scattering and low-absorbing layers of inorganic coatings and films in the range from 0.1 mm to 0.6 mm in real time with a relative measurement error of less than 10% is considered. The measurements are performed using a combination of two methods – laser interferometry and modified triangulation. The subject of the study is to determine the set of parameters necessary for measuring the thickness by the specified optical methods; the purpose of the study is to develop a way to measure the thickness by the combined method so that the refractive index of the sample under study is absent in the set of necessary parameters. The principle of operation when using the combined method is presented and the search for optimal parameters of the measuring installation is carried out, which allows to reduce the measurement error to 5% while reducing the information content of the measurement by 3 times only. The main advantage of the proposed approach is that information on the numerical value of the refractive index of the measured layer is not required to determine the thickness by the combined method.

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