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RESEARCH OF A PIEZOELECTRIC SENSOR OF LOCAL INTERACTION OF SCANNING PROBE MICROSCOPE WITH THE PROBE IN THE FORM OF THE MICROPIPETTE

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The piezoelectric sensor for scanning probe microscope with a probe in the form of a glass micropipette has been researched. Resonant frequency and Q-quality of the sensor have been measured in air and liquid environments. The spatial resolution has been shown using a test lattice. The conclusion about an opportunity of using of the sensor with a micropipette in the liquid environment with simultaneous activity in semicontact force mode and in a mode of measurement of ionic currents has been made.

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