TECHNOLOGICAL ASPECTS OF FORMING THIN-FILM FUNCTIONAL STRUCTURES ON THE SURFACES OF ACCELEROMETER UNITS
Annotation
The technology of forming thin-film functional coatings on flat surfaces of precision accelerometers by magnetron sputtering is considered using examples of aluminum deposition in the manufacture of a base plate for a sensitive element of a micromechanical accelerometer. A mathematical model of uniform thickness coating formation on a flat surface is presented, and the main significant parameters of the spraying process are determined. The optimized parameter is the orientation angle of the substrate relative to the magnetron target, and the optimization criterion is the minimum value of the standard deviation of the coating thickness. The effectiveness of the proposed model is confirmed by the practical results of studies of the characteristics of the coatings obtained.
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