Journal
Scientific and technical journal «Priborostroenie»
UDK531.7.082.5:535.42/44
Issue:11 (54)
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CONTROL OVER GEOMETRICAL PARAMETERS OF AN OBJECT BY LOCATION OF INFLECTION POINTS IN FRAUNHOFER DIFFRACTION PATTERN
Annotation
A method of estimation of object size by position of inflection points in the main maximum of diffraction pattern is proposed. The method is shown to possess a high sensitivity to variation of the object size and allows performing the measurements with accuracy of 0,1 microns.
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