Journal
ИЗВЕСТИЯ ВЫСШИХ УЧЕБНЫХ ЗАВЕДЕНИЙ «ПРИБОРОСТРОЕНИЕ»
UDK535.317.2
Issue:1 (54)
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APPLICATION OF COMPUTER ISOPHOTOMETRY FOR CHECKING OF OBJECTIVE FOR NANOLITHOGRAPHY
Annotation
Quality control of optical surface finishing for modern Schwarzschild reflecting objectives operating in the EUV spectral range is shown to call for direct photometry of image structure. The method of isophotometry of point test object image allows to overcome restrictions caused by insufficient sensitivity of diffraction interferometry.
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