Journal
Scientific and technical journal «Priborostroenie»
UDK537.311.322
Issue:5 (55)
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COMPUTER-ADDED HIGH-PERFORMANCE LASER INTERFEROMETER FOR TRANSPARENT FILMS THICKNESS MEASUREMENT
Annotation
Principles of interferometric measurement of transparent layer thickness are formulated. A description of optical-mechanical tract, electronic circuit, and software of a modernized interferometer is given. Mathematical justification of the measurement principles and electronic scheme of the signal registration are presented. A PC program for data processing is described in details.
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