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STUDY OF PIEZOELECTRIC ACTUATORS OF A MICROROBOT

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Tubular piezoelectric actuators of microrobot based on spherical joint with parallel kinematics are considered. The effect is revealed of the ball rotation caused by the piezoactuator asymmetry when operated at ultrasonic resonance frequencies. The ball motion parameters are calculated. Technology of the actuators manufacturing is analyzed, advantages of application of ultrasonic shaping of the tubes are demonstrated.

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