Journal
Scientific and technical journal «Priborostroenie»
UDK621.384
Issue:7 (56)
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FORMATION OF REGULAR MICRORELIEF ON SOLID SURFACE WITH SHARPLY FOCUSED BEAM OF HEAVY IONS
Annotation
The process of groove profile formation on solid surface under the action of sharply focused beam of heavy ions is studied. Main parameters of the process affecting the formatted grove geometry characteristics are determined.
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