Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK53.084.2
Issue:5 (63)
RESEARCH OF DYNAMIC FORCE LITHOGRAPHY MODE IN SYSTEM "METAL-POLYMER"
Annotation
The simple and inexpensive technology of conducting structures creation with the lowered dimension on the basis of dynamic force lithograph (DFL) method application to system «metal – polymer» is offered. Results of local DFL – modifications of polycarbonate surface and polycarbonate covered with aluminum film (Al) with tungsten nanoprobes and radius about 100 nanometers are given. Modification results are analyzed by means of scanning probe and raster electronic microscopes.
Keywords
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