SILVER-NANOPARTICLE-BASED ETCH MASK CONTROL FOR SUBWAVELENGTH STRUCTURE DEVELOPMENT
Annotation
In this paper, we investigate the impact of silver thin film thickness and annealing temperatures for the fabrication of silver nano-particles of controlled size and spacing distributions. We also use these mea- sured distributions to predict the performance of subwavelength grating structures developed using dry and isotropic etching of semiconductor substrates. Silver (Ag) thin films of different thicknesses were deposited on Si and GaAs semiconductor substrates and annealed at different temperatures. Experimental results demonstrate that by annealing the Ag thin films with different temperature profiles it is feasible to develop Ag nanoparticles of an average diameter ranging from 50 nm to 400 nm on silicon substrates and 100 nm to 500 nm on GaAs substrates. In addition, different subwavelength structures developed by etching the Ag nanoparticle deposited Si and GaAs substrates are simulated using a Finite-Difference Time Domain (FDTD) software package. Simulation results show that substantial reduction in light reflection can be achieved by optimizing the heights of the subwavelength structures through the control of the etching process time.
Keywords
Постоянный URL
Articles in current issue
- METHOD OF SYMMETRIC POLYNOMIALS IN THE COMPUTATIONS OF SCATTERING MATRIX
- HEAT TRANSPORT IN MARANGONI LAYERS WITH NANOPARTICLES
- MODEL OF NON-AXISYMMETRIC FLOW IN NANOTUBE
- ABSORPTION OF ELECTROMAGNETIC RADIATION IN THE QUANTUM WELL PLACED IN A MAGNETIC FIELD
- ULTRASHORT OPTICAL PULSE PROPAGATION IN A DOUBLE LAYER OF GRAPHENE BORON NITRIDE WITH ACCOUNTING THE MATERIAL DISPERSION
- INTERATOMIC INTERACTION IN FCC METALS
- PRE-CHROMATOGRAPHY CRUDE SEPARATION OF LIGHT FULLERENES BY POLY-TERMICAL (RE)CRYSTALLIZATION METHOD
- STRUCTURE PECULIARITIES OF NANOCRYSTALLINE SOLID SOLUTIONS IN GdAlO3 — GdFeO3 SYSTEM
- DIELECTRIC STUDIES OF NANOCRYSTALLINE MANGANESE TUNGSTATE
- STRUCTURAL PROPERTIES OF COBALT SUBSTITUTED BARIUM HEXAFERRITE NANOPARTICLES PREPARED BY A THERMAL TREATMENT METHOD
- PREPARATION AND ANTIMICROBIAL OBSERVATIONS OF ZINC DOPED NANOHYDROXYAPATITE
- DIELECTRIC WAVEGUIDE OPTIMIZATION FOR THE ENHANCEMENT OF TE-POLARIZATION TRANSMISSION OF PLASMONICS-BASED MSM-PD
- EFFECT OF Li+ CO-DOPING ON THE LUMINESCENCE PROPERTIES OF ZnO:Tb3+ NANOPHOSPHORS
- THE EFFECTS OF DEFECTS ON ELECTRON TRANSPORT IN METALLIC SINGLE WALL CARBON NANOTUBES
- ELECTROFABRICATION OF NANOSTRUCTURED MULTILAYER COATINGS FOR BETTER CORROSION PROTECTION
- NOISE CANCELLATION IN UNSHIELDED MAGNETOCARDIOGRAPHY BASED ON LEAST-MEAN-SQUARED ALGORITHM AND GENETIC ALGORITHM
- COMPOSITES OF SINGLE WALLED CARBON NANOTUBES AND LIQUID CRYSTALS AS SWITCHABLE CONDUCTORS
- EFFECT OF SINTERING TEMPERATURE ON THE STRUCTURAL AND MAGNETIC PROPERTIES OF COBALT FERRITE NANOPARTICLES