Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK
Issue:13 (58)
OPTICAL OBJECTIVE CONTROL PECULIARITIES FOR NANOSTRUCTURES FORMATION
Annotation
For microelectronics development and obtaining the minimal size of a microchip element at the 10 nm level it is necessary to work out control tools of extended precision. It is shown that the main task to support the production of projection lens elements is creation of control tools for correlation between control and operating wavelengths in a deep vacuum-ultraviolet range. The interferometer for wave aberrations research is described.
Keywords
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Articles in current issue
- THREE-DIMENSIONAL MODEL RECONTRUCTING BY MEANS OF STEREO IMAGES CONSIDERING ITS MULTISEQUENCING
- MATHEMATICAL AND PROGRAM DATA PROCESSING OF SPECTROPHOTOMETRIC MEASUREMENTS
- MEASUREMENT OF THE OPTICAL CONSTANT OF PAINTED POLYMERIC MATERIALS FOR EYEGLASS OPTICS
- CHOICE OF OPTIMUM ANTIREFLECTIVE COATING FOR APPLICATIONS TO SOLAR ENERGY
- OPTICAL OBJECTIVE CONTROL PECULIARITIES FOR NANOSTRUCTURES FORMATION
- ALGORITHM OF OBJECTS ARRANGEMENT (ON THE EXAMPLE OF A MIRROR)
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- NUMERICAL SOLUTION OF GINZBURG-LANDAU EQUATIONS FOR SUPERCONDUCTING PLATES WITH DIFFERENT BOUNDARY CONDITIONS
- THE ITERATIVE SOLUTIONS OF THE EQUATION OF NONPARAXIAL DYNAMICS OF A SPATIAL SPECTRUM OF MONOCHROMATIC TWO-DIMENSIONAL POLARIZED ELECTROMAGNETIC WAVE IN MEDIA ALONG DIELECTRIC WAVEGUIDES WITH CUBE-NONLINEARITY
- MEASURING DEVICE FOR TEMPERATURE AND MECHANICAL DEFORMATION CONTROL ON BASIS OF FIBER OPTIC SENSORS
- DIELECTRIC PARTICLES TRAPPING AND DEFORMATION BY THE GRADIENT FORCES OF THE LIGHT PRESSURE
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- RAMAN STUDY OF PHASE SEPARATION IN NANOSTRUCTURED TITANIA-CONTAINED ZINC ALUMOSILICATE CoC DOPED GLASSES
- NANO-TIP RESEARCH FOR UPDATING THE SURFACE OF POLYMER BY THE METHOD OF DYNAMIC POWER LITHOGRAPHY
- RESEARCH OF SEMICONDUCTING CRYSTALS EXCITON STATE TRANSFORMATION TO ELECTRON- HOLE STATE OF SEMICONDUCTOR QUANTUM DOTS