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OPTICAL-ELECTRONIC INSTRUMENT FOR CONTROL OVER GEOMETRICAL PARAMETERS OF DIFFUSE REFLECTING OBJECTS

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An optical-electronic instrument operating in scanning and trigger modes is developed on the base of Michelson interferometer. Analysis of a complex-shape surface is carried out; random modulations of interference signal and measurement errors caused by variation of optical path length of object beam at tangential movement of the object are studied. A method is proposed for minimization of the effect of speckle-modulation of interference signal by increasing the number of independent measurements during one pass of optical measuring head and subsequent averaging. The method realization employs an additional modulation of optical path length difference. Experimental results obtained with the instrument make it possible to determine the measurement discreteness and the limit of allowable speed of diffusereflecting object movement during the dynamic measurements.

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