MICROLENS ARRAY FABRICATION ON FUSED SILICA BY LIBBH TECHNOLOGY WITH CO2 LASER SMOOTHING
Annotation
A new technology for microlens array fabrication is presented. The technology is based on creation of the initial microstructures on fused silica by laser indirect method, and the following reflow process of these structures made by CO2 laser action. Microlens arrays with diameter of microlens equal to 150 μm are fabricated. The focal length of microlens varies from 5 up to 5 mm. Profiles of formed microlens correspond to circle equation.
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