DYNAMIC MODEL OF DUST CONCENTRATION FOR AUTOMATIC CONTROL SYSTEM OF MICROELECTRONICS PRODUCTION
Annotation
A refined model of behavior of dust concentration as a climatic parameter of the air of a clean room in microelectronics production enterprise is developed. The adequate simulation model of the climate dynamical system is based on presented mathematical description of the parameter. Results obtained in MATLAB using the developed model confirm the effectiveness of fuzzy control of climate system under unpredictable disturbances when traditional PID controllers are buckling.
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