HIGH-PRECISION ABSOLUTE LINEAR POSITION SENSOR BASED ON A STANDARD LINE MEASURE
Annotation
The full cycle of research and development of a high-precision absolute linear position sensor based on standard line measure is presented. The sensor uses a standard line measure of invar alloy, which is an incremental scale with 1 mm interval between strokes. Absolute measurements are realized using a magnetic channel for numbering of strokes and an optical channel for precise estimation of current sensor position. An image processing algorithm for calculating position in real time is developed. A three-step calibration proce-dure used to eliminate the systematic measurement error is described. According to performed test measurements, the developed sensor has an accuracy of 1.65 μm (3 standard deviations) at a speed of up to 3 m/s. Application of a standard line measure is noted as the main advantage of the development, which ensures unification and compatibility with standard metrology equipment.
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