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CALCULATION OF ANGULAR RIGIDITY OF ELASTIC ELEMENT FOR MICROMECHANICAL ACCELEROMETER

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The problem of creating domestic-produced elements to be used as a base for microelectromechanical systems meeting all modern requirements of the global consumer market. A mathematical model of a new complex-profile elastic suspension element of a mechanical accelerometer is proposed. Various mathematical models for calculating beam (rod) elastic elements of suspensions of micromechanical devices are analyzed, plots for various loading schemes were constructed, supporting reactions, moments and calling forces acting on an elastic element during bending deformations were considered. Based on the analysis, a mathematical model is developed for calculating the angular rigidity of a new complex-sensitive element that takes into account the elastic modulus of the first kind of material of an elastic element, Poisson’s ratio, the radius of cylindrical holes in the elastic element, the width of the element, the thickness of the elastic element in its narrowest part, and the ratio thickness to width with maxi-mum and minimum tolerances.

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