Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK539.232; 542.06; 546-1
Issue:3 (85)
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AL2O3 NANOSTRUCTURED FILMS CREATION BY METHOD OF ELECTROCHEMICAL ANODIZING
Annotation
Thin oxide films of aluminum were investigated by method of scanning probe microscopy. Electrical parameters of anodizing process were studied on different samples of aluminum to get the most structured oxide. The comparison of surface structure topography was held on oxide films by NTegra scanning probe microscope.
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