Journal
Scientific and technical journal «Priborostroenie»
UDK621.315.592; 621.315.51.6; 621.3.049.77.14
Issue:3 (52)
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ТЕХНОЛОГИЧЕСКИЕ ОСОБЕННОСТИ ВЫБОРА МАТЕРИАЛОВ И МЕТОДОВ НАПЫЛЕНИЯ УЗЛОВ ГИРОПРИБОРОВ
Annotation
It is shown, that the silicon nanoclusters within layers SiO2 can have the various form and structure. In cases when silicon nanoclusters are formed on silicon substrates by methods nanolithography of surfaces with the subsequent thermal oxidation or a laser irradiation of the oxidized silicon, nanoclusters usually have crystal structure. At use of other methods of formation silicon nanoclusters for reception of diamondlike structures of these clusters, the additional processing is usually required, in particular, high-temperature anneal.
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Articles in current issue
- SOLUTION OF THE PROBLEM OF NONLINEAR PARAMETRICAL IDENTIFICATION OF STOCHASTIC OBJECTS BASED ON THE MINIMUM CRITERION OF THE ESTIMATION ERROR PROBABILITY
- METHOD OF ADAPTIVE SCALAR QUANTIZATION IN LOSSY IMAGE COMPRESSION SCHEMES
- SPEECH COMMANDS AUTOMATIC RECOGNITION SYSTEM
- TRANSFORMATION OF SINGLY-CONNECTED BAYESIAN BELIEF NETWORKS INTO ALGEBRAIC BAYESIAN NETWORKS
- DYNAMIC SYSTEMS WITH VARIABLE STRUCTURE AND DIMENSION
- IMITATING MODELING AT RESEARCH OF TIME CHARACTERISTICS OF DISCRETE SYSTEMS
- OPTIMAL CONTROL OF WIND-DRIVEN POWERPLANT BY OSCILLATING MODE
- TECHNOLOGY OF TRAINING DIALOGUES CONSTRUCTION IN COMPUTER TUTORIAL TRAINING SYSTEMS
- INTEGRATION OF PRODUCT DATA MANAGEMENT SYSTEMS AND COMPUTER-AIDED DESIGN SYSTEMS: FROM PARTIAL SOLUTION TO GLOBAL STRATEGY
- DOPPLER SIGNALS SPECTRUM ANALYZER
- INFLUENCE OF TRANSPARENT MATERIAL ON OPTOELECTRIC SIGNAL IN NANOGRAPHITE FILMS
- PHOTO REGISTERING DEVICES FOR REPRODUCTION OF SPACE-METEOROLOGICAL SYSTEMS OF 3rd GENERATION
- CALCULATION AND RESEARCH OF DOUBLE-MIRROR COMPOSITION OF OPTICAL SISTEMS
- ABERRATIONAL PROPERTIES OF REFLECTING SURFACE OF THE SECOND ORDER
- TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS