Journal
Scientific and technical journal «Priborostroenie»
UDK621. 793. 18
Issue:3 (52)
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TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS
Annotation
The article considers the main principles of choice materials and sputtering methods of functional coatings as applies to gyro-devices units. These principles follow from technical requirements to product, its geometrical and functional features and physic-mechanical and thermo-physical properties of coating material.
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