TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS
Annotation
The article considers the main principles of choice materials and sputtering methods of functional coatings as applies to gyro-devices units. These principles follow from technical requirements to product, its geometrical and functional features and physic-mechanical and thermo-physical properties of coating material.
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- TECHNOLOGICAL FEATURES OF CHOICE MATERIALS AND SPUTTERING METHODS FOR GYRO-DEVICES UNITS