Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK53.084.2
Issue:2 (66)
NANOWHISKER GROWTH UNDER ELECTRON BEAM IMPACT: MATHEMATICAL MODEL
Annotation
We present mathematical model of nanowhisker growth at the conductor surface in the vacuum chamber of scanning electron microscope under focused electron beam impact. Carbon ions with positive charge come out from chamber surface and are captured by electron beam field. Ions move along electron beam and subside at nanowhisker surface. This process provides nanowhisker growth. In that model electrical field and beam potential are approximated by electrical field and potential of uniformly charged wire. For that simplification Vlasov equation is written, that gives equation of nanowhisker surface movement. By numerical methods we simulated and visualized the process of nanowhisker growth. Computing program builds dynamic grid, which simulates growing whisker – dynamic growth in real time. Obtained results go well with experimental data.
Keywords
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