Journal
Scientific and technical journal «Priborostroenie»
UDK531.715
Issue:9 (56)
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DIFFRACTION TECHNIQUE ACCURACY IN MEASUREMENT OF ROUND MICROOBJECT ILLUMINATED BY SPATIALLY INHOMOGENEOUS LIGHT
Annotation
The effect of symmetrical and asymmetrical inhomogeneity in spatial distribution of illuminating light field amplitude on diffraction pattern is considered. Relative variation of intervals between minimums in Fraunhofer diffraction pattern for Gaussian beam diffraction on a circular aperture is analyzed.
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