Journal
Scientific and technical journal «Priborostroenie»
UDK620.179.118.4
Issue:6 (57)
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ROUGHNESS MEASUREMENT OF PRECISION OPTICAL SURFACES BY THE INTERFERENCE MICROSCOPY METHOD
Annotation
Application of the incoherent interferometry method to measure random mean square value of surface roughness of precision optical elements is considered. The results of measurements with the use of the white light interferometer CCI-2000 by Taylor-Hobson are compared to data obtained by the stylus profiler NV-6200 by Zygo.
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