Journal
Scientific and technical journal «Priborostroenie»
UDK621.7.077, 681.513.3
Issue:12 (59)
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STUDY OF STAGE WITH THE BIMORPH PIEZO-ACTUATORS
Annotation
Variants of multi-axis platforms used in devices for object micro-positioning are analyzed. A microscope XY-stage with parallel kinematic and piezoelectric drive based on bimorph actuators is recommended. Results of experimental study of the XY-stage are presented and conclusions are formulated.
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