APPLICATION OF CROSS-SHEAR INTERFEROMETRY IN HOLOGRAPHY FOR CONTROL OF GEOMETRIC PARAMETERS OF DIFFUSE-REFLECTING SURFACES
Annotation
Various methods of interference fringes tuning are evaluated. The features of two-beam holographic registration and reconstruction of the original and perturbed states of a diffuse reflecting surface are considered. Quantitative assessment of measurement error is carried out; the deviation of one of the supporting beams at 10–5 rad is shown to lead to phase shift of the object wave for 0,22 of the interference fringe and to the error in the phase of the interference fringe δφ = 2π·0,22. The possibility of applying shear interferometry instead of two-beam interferometry allows to use a single reference beam and thus improve the measurement accuracy for two orders of magnitude. The phase difference between the beams at the output of transverse shear interferometer (Jamin interferometer) is analyzed. The result allows to estimate the measuring range of the displacement vector magnitude; the maximum and the minimum value of the measured offset are determined to be 1,5 mm and 0,01 μm respectively.
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