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COMPENSATION OF ERROR CAUSED BY INHOMOGENEOUS AIR PATH IN THE CONTROL SYSTEM OF REFERENCE MARKS SPATIAL POSITION

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The effect of vertical temperature gradient in the air on spatial position of active reference marks measurement accuracy is investigated for the case when the marks are mounted on an object controlled by an optical electronic system. To compensate the effect of air medium inhomogeneity, application of the dispersion method is proposed. Interrelation of control accuracy requirements and system parameters is shown. Accuracy of dispersion difference evaluation is estimated experimentally. A condition is derived for system parameters choice based on minimization of non-excluded error component.  

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