METHOD OF LINEAR DISPLACEMENT MEASURING USING OPTICAL RASTER ILLUMINATED BY SPHERICAL WAVE FRONT
Annotation
A new method for measuring linear displacements based on illumination of optical raster by a spherical wave front formed by a point hole is presented. The proposed method allows to measure the raster movement with an error of about 0.001 %. It is shown that the proposed scheme has a large displacement transformation coefficient and allows to register small displacements of the raster.
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