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EXPERIMENTAL STUDY OF CHARACTERISTICS OF NEW-GENERATION PIEZOELECTRIC DRIVE

Annotation

Results of experimental determination of characteristics of piezoelectric drives based on thin-film lowvoltage piezoelectric actuators are presented. Estimations are carried out of potentially achievable values of technical characteristics of the drives for micro-movements of operated modules of precision devices. Problems of realization of high-precision and stable-working micro-movers are discussed.

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