Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK531.7/004.932
Issue:5 (69)
DIGITAL PROCESSING OF FRAUNHOFER DIFFRACTION PATTERNS AT THE OBJECTS GEOMETRICAL PARAMETERS CONTROL
Annotation
New method of diffraction pattern digital processing, which will allow increasing the accuracy of the diffraction control methods, is developed. It is offered to register coordinates of inflexion points of the diffraction pattern principal maximum, which have high sensitivity to resizing of controllable object.
Keywords
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