Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK544.537
Issue:5 (69)
THIN METAL FILMS STRUCTURE RESEARCH AFTER FEMTOSECOND LASER RECORDING
Annotation
Thermochemical method of thin Cr films modification by laser pulses of super short width is considered. Illumination modes till exhalation are examined. Illuminated areas in the atmosphere and vacuum steady for etching are obtained. Structural and chemical composition of illuminated areas is determined. The most technological mode of Cr modification is selected increasing the method resolution.
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