Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK537.533.35+537.534.35
Issue:4 (68)
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The piezoelectric sensor for scanning probe microscope with a probe in the form of a glass micropipette for scanning ion-conductance microscopy has been made. Resonant frequency and Q-quality of the sensor have been measured in the air and liquid environments. Nanotip has been created for spatial resolution improvement of a microprobe by means of the focused ion beam at a pipette butt end. Using a test grid, the spatial resolution of a microprobe with nanotip is shown. The conclusion about an opportunity of using the sensor with a micropipette in the liquid environment with simultaneous activity in semi contact force mode and in a mode of measurement of ionic currents has been made.