Journal
Scientific and technical journal of information technologies, mechanics and optics
UDK537.533.35+537.534.35
Issue:4 (68)
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ION LITHOGRAPHY APPLICATION FOR NANOSCALE CHANNEL FORMATION IN GLASS MICROFLUID CHIPS
Annotation
Etching processes of K8 glass with gold, carbon and chrome coatings are investigated. It is shown that the minimal reproducible size of focused ion etching micro channel is 40 nm. Experimental microfluid chip prototype with nanochannels for biological probes fixation and investigation are obtained.
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